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Silicon Devices and Process Integration: Deep Submicron and Nano-Scale Technologies Badih El-Kareh 2009 edition
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Silicon Devices and Process Integration: Deep Submicron and Nano-Scale Technologies
Badih El-Kareh
Compiled from industrial and academic lecture notes and reflecting years of experience in the development of silicon devices, this book covers both their theoretical and practical aspects, and how their electrical properties and processing conditions interact.
598 pages, 17 black & white tables, biography
| Medien | Bücher Gebundenes Buch (Buch mit hartem Rücken und steifem Einband) |
| Erscheinungsdatum | 12. Januar 2009 |
| ISBN13 | 9780387367989 |
| Verlag | Springer-Verlag New York Inc. |
| Seitenanzahl | 598 |
| Maße | 155 × 235 × 33 mm · 1,04 kg |
| Sprache | Englisch |
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